The key role of reverse osmosis equipment in semiconductor manufacturing

Lefilter2025-04-30 BACK TO LIST

Ultrapure Water: The Lifeline of Semiconductor Precision

In the microscopic realm of semiconductor wafer fabrication, where every micron-scale process hinges on perfection, ultrapure water (18.2MΩ·cm at 25°C) is the invisible backbone—eliminating even nanoparticle interference to safeguard nanoscale circuits.

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Core Defense: Reverse Osmosis (RO) Systems

  • Removes >99% of particles, microbes, and dissolved salts, ensuring "zero-defect" water purity.

  • Collaborates with pretreatment, EDI (electrodeionization), and UV sterilization to form a multi-barrier purification chain.

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Technical Challenges & Breakthroughs

  • 12-inch wafer production: 0.05-micron impurities (hair-width scale) can disrupt photoresist integrity, slashing yield and reliability.

  • Custom pretreatment: Tailored solutions for varied water sources (tap, ground, surface):
    ● Ultrafiltration for colloid removal
    ● Antiscalant protocols to prevent mineral buildup

  • Proven impact: A display panel factory achieved 3.2% yield boost—saving tens of thousands of defect-free wafers per million produced.

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Sustainability Edge

  • Chemical-free efficiency: Reduces acid/alkali use and wastewater energy costs.

  • Closed-loop sustainability: Minimizes water waste through precision recycling.


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