Project Background
Upgrade of ultra pure water system at a 12 inch wafer fab in Shanghai
This project is located in Shanghai and belongs to a professional enterprise engaged in 12 inch wafer
foundry. In order to meet the strict requirements of advanced processes for ultra pure water quality,
the factory has launched a technical transformation of the terminal polishing unit. The total investment
of the project is 80 million yuan, with a construction period of 9 months. The goal is to upgrade the
core links to ensure that the quality of the produced water is better than the industry SEMI standards,
and to ensure that the water used for wafer washing reaches a high level of purity.
Technology application
Metal sintered filter element as a key unit of the system
This project is equipped with 22 high-precision metal powder sintering filter elements after the terminal
polishing mixed bed. These filter elements serve as the filtering barriers at the end of the system, responsible
for removing trace particles, residual ions, and total organic carbon from water, providing reliable support
for the overall water quality improvement of the system through stable and efficient operation.
Product Features
Metal powder sintered filter cartridge
The metal powder sintered filter element is formed by high-temperature sintering process and
belongs to porous metal filter material, with the following characteristics:
High precision filtering performance
It can effectively intercept micron level and even submicron level particle impurities, ensuring
the cleanliness of water bodies;
Good mechanical strength
Stable structure, strong pressure resistance, suitable for high pressure differential working
conditions;
Corrosion and high temperature resistance
The material selection is diverse and can adapt to various chemical media and high-temperature
environments;
Long service life
The sintering process endows the filter element with good anti clogging and washability,
reducing the frequency of replacement;
Low shedding, low pollution
The material is pure and avoids introducing secondary pollution, suitable for ultra pure water systems.
As a typical case of technological upgrading, this project demonstrates the potential application of
metal sintered materials in high-tech industries such as semiconductors and electronic chemicals.
Through this renovation, the company has achieved an improvement in the quality of ultrapure
water, providing support for the yield and product reliability of chip manufacturing.
The metal sintering fine chemical industry project is always committed to providing customers
with high-performance sintering filtration products and system solutions, helping enterprises achieve
technological progress and process upgrades.
Driven by technology and based on quality. The application of metal sintered filter cartridges in
ultrapure water systems is a reflection of the combination of material technology and industrial
demand.
In the future, we will continue to promote innovative applications of sintering technology in
different industries, providing support for the continuous progress of China's manufacturing industry.
